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    Semiconductor device fabrication is the process used to manufacture semiconductor devices, typically integrated circuits (ICs) such as computer processors, microcontrollers, and memory chips (such as NAND flash and DRAM). It is a multiple-step photolithographic and physio-chemical process … See more

    Feature size is determined by the width of the smallest lines that can be patterned in a semiconductor fabrication process, this measurement is … See more

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    When feature widths were far greater than about 10 micrometres, semiconductor purity was not as big of an issue as it is today in device … See more

    In semiconductor device fabrication, the various processing steps fall into four general categories: deposition, removal, patterning, and … See more

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    20th century
    An improved type of MOSFET technology, CMOS, was developed by Chih-Tang Sah and See more

    This is a list of processing techniques that are employed numerous times throughout the construction of a modern electronic device; this list … See more

    A typical wafer is made out of extremely pure silicon that is grown into mono-crystalline cylindrical ingots (boules) up to 300 mm (slightly less … See more

    The highly serialized nature of wafer processing has increased the demand for metrology in between the various processing steps. For example, thin film metrology based on ellipsometry or reflectometry is used to tightly control the thickness of gate … See more

     
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